Spectroscopic ellipsometer UVISEL HORIBA
Spectroscopic ellipsometry is a simple and fast optical and indirect technique that offers the possibility to determine the average thickness of the adsorbed layer. Ellipsometry measures the ratio of two values, which is the amplitude ratio (Ψ=rp/rs) and the phase difference between light waves (Δ=Δp-Δs). These two parameters are defined from the difference in the reflection coefficients for p- and s- polarizations and thus in the optical properties of a material (extinction coefficient and refractive index). We have in house an UVISEL HORIBA spectroscopic ellipsometer covering a wavelength range of 200 – 820 nm.